A Study of Rework Strategies and Dispatching Rules for Photolithography in Wafer Fabrication Factories
碩士 === 國立交通大學 === 工業工程與管理系 === 87 === In wafer fabrication, the material of wafer and machine cost is expensive. To increase the wafer yield, defective wafers produced during the process need to be repaired as possible. However, rework of wafer is only allowed in the photolithography area of a wafe...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/40589385908833161311 |