Fabrication Processing of Cantilever Microactuator Using PZT Thin Film
碩士 === 國立交通大學 === 材料科學與工程系 === 87 === The good quality piezoelectric characteristics of PZT materials can be used for the fabrication of piezoelectric micro-actuator. In the investigation, we first focused on the processing development of sol-gel PZT films along with Si bulk micro-machining. It was...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/29274686754114270279 |