The Characterization of Pure Metal Targets AID Deposited TiZrN Thin Film
碩士 === 國立交通大學 === 材料科學與工程系 === 87 === In this study it tried to deposit TiZrN thin films on SKD11 steels and 304 stainless steels in the way of arc ion plating by pure Ti and Zr metals and studied in the effects of various process parameters for coatings. In analysis, the structures, comp...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/23938132663383407002 |