A Study of Thermally Actuated Microvalve and Micro Flow Sensor
碩士 === 國立交通大學 === 電子工程系 === 87 === Thermally actuated microvalves and micro-flow sensors are very potential in the field of MEMS. They are small devices with large actuation range, low power consumption and precise sensing ability. Besides, they can be integrated to construct a micro flow...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45148591607591771301 |