Observation of Gas Flow and Heat Transfer Measurement in a Vertical Single-Wafer RTP Processor
碩士 === 國立交通大學 === 機械工程系 === 87 === Single wafer, rapid thermal processing (RTP) is known to play an important role in the recent microchip manufacturing. In this study a lamp heated vertical RTP processor for an eight-inch wafer is used to investigate the thermal and flow characteristics...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/84361077679633164795 |