Investigation of the pumping mechanism of turbo molecular pump
碩士 === 國立交通大學 === 機械工程系 === 87 === In this thesis, the Antoniou’s drag method is adopted to predict the performance of compound Turbo Molecular Pump (TMP). The numerical models of pumping speed and compression ratio are functions of the geometrical parameters of the pump including blades’...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/63661151283350847529 |