Chemical Vapor Deposition of Vanadium Carbonitride Thin Films from Alkylimidovanadium Complex
碩士 === 國立交通大學 === 應用化學系 === 87 === The imido complexes tBuNVCl3 and tBuNV(NEtMe)3 were successfully synthesized. NMR spectroscopy, mass spectroscopy and elemental analysis characterized these complexes. tBuNV(NEtMe)3 was used as a single-source precursor to deposit thin films o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64528452863768281414 |