The Design of Automatic Monitor and Controller for a Cu-CVD System
碩士 === 國立交通大學 === 電機與控制工程系 === 87 === An automatic remote control system for Cu_CVD system is proposed here. This system has both the monitor and control functions so that the users can supervise a Cu_CVD system through the network. In this thesis, the whole system is categorized to two subdesigns:...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/34686847485538611921 |