Fabrication and Characteristics of Si-Based Metal-Semiconductor-Metal Photodetectors
博士 === 國立中央大學 === 電機工程研究所 === 87 === The fabrication and characteristics of the Si-based planar metal-semiconductor-metal photodetectors (MSM-PD''s) had been investigated in this dissertation. These MSM-PD''s could be easily integrated into the Si optoelectronic integrated circui...
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/50396341267984401568 |