Deposition and Properties of AlN/TiN & AlN/ZrN Superlattice Coatings

碩士 === 國立東華大學 === 材料科學與工程研究所 === 87 === This project studies the preparation and properties of a new class of advanced multilayered AlN/TiN and AlN/ZrN coatings. It investigates the relationships among processing methods and the coating microstructure and properties and facilitates the understandin...

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Bibliographic Details
Main Authors: Gwo-Yih Hsiao, 蕭國益
Other Authors: Ming-Show Wong
Format: Others
Language:en_US
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/24045468298732152343