Study on photoresist applied in KrF excimer laser LIGA process
碩士 === 國立清華大學 === 化學工程學系 === 87 === Abstract LIGA, one of the MEMS'' manufacturing technologies, fabricates microstructures with high aspect ratio. This process involves deep etched x-ray lithography, electroforming, and molding. Laser-LIGA process mentioned in the subject is different f...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45151705680734714804 |