Well-aligned Carbon Nanotubes Synthesis on Porous Silicon by Electroless Plated Pd and Microwave Enhanced Chemical Vapor Deposition
碩士 === 國立清華大學 === 材料科學工程學系 === 87 === We propose a method to synthesize aligned carbon nanotubes on selected-area silicon in one step by microwave plasma ehance chemical vapor deposition (MPECVD) system with a mixture of methane and hydrogen as precursors and applied DC bias.The pretreatm...
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| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/06302495104609888290 |