Well-aligned Carbon Nanotubes Synthesis on Porous Silicon by Electroless Plated Pd and Microwave Enhanced Chemical Vapor Deposition

碩士 === 國立清華大學 === 材料科學工程學系 === 87 === We propose a method to synthesize aligned carbon nanotubes on selected-area silicon in one step by microwave plasma ehance chemical vapor deposition (MPECVD) system with a mixture of methane and hydrogen as precursors and applied DC bias.The pretreatm...

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Bibliographic Details
Main Authors: Chi-wei Chao, 趙志偉
Other Authors: H.C. Shih
Format: Others
Language:en_US
Published: 1999
Online Access:http://ndltd.ncl.edu.tw/handle/06302495104609888290

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