Synthesis and Electron Field Emission Properties of Amorphous Carbon Nitride Films by ECR-CVD System
碩士 === 國立清華大學 === 材料科學工程學系 === 87 === Amorphous carbon nitride thin films were synthesized in a mixture of C2H2, N2 and Ar as the precursor by the electron cyclotron resonance chemical vapor deposition system equipped with a dc bias to the substrate of silicon. The film prepared as such w...
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/91315801452337760377 |