Fabrication and characterization of the thermopile on Si substrate
碩士 === 國立海洋大學 === 電機工程學系 === 87 === A multi-layer technology for manufacturing thin-film micro-thermopile sensor is presented. The mask to fabricate the thermopile was discussed in detail. The thermopile device composing of the two thermoelectric material (NiCr and BiSb) is arranged one o...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/97476127022415174397 |