鈦鎳銅三元形狀記憶合金薄膜濺鍍參數之研究
碩士 === 國立臺灣大學 === 材料科學與工程學研究所 === 87 === Effect of sputtering parameters on the composition variation of TiNiCu thin film is investigated in this study. Composition variation of thin film may be resulted from Ti, Ni, and Cu atoms leaving the target with different initial energy and select...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93995056248078302677 |