III-V Semiconductor Micromachining and Its Application in Sensing Elements
博士 === 國立臺灣大學 === 電機工程學研究所 === 87 === This dissertation studies GaAs/GaInP heterostructures micromechanics and the novel piezoresistivity mechanism originated from the piezoelectric charges in GaAs mesa resistors for applications in stress transducers. The wet chemical micromachining of GaAs/GaInP w...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/79629348972291442641 |