The Fabrication and Analysis of Hydrogenated (Deuterated) Thin Film Transistor of Amorphous Silicon and Polysilicon
博士 === 國立臺灣大學 === 電機工程學研究所 === 87 === The characteristics of amorphous silicon hydrogen and deuterium thin film transistors (a-Si:H/a-Si:D TFT) were studied. The D2 or H2 plasma was applied to treat the amorphous silicon layers. It was found that substitution of hydrogen with deuterium improved the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/59640196767281175857 |