Simulation and Dispatching for Automated Material Handling Systems in a 300mm FAB
碩士 === 國立臺灣大學 === 機械工程學研究所 === 87 === The IC manufacturing is migrating to larger wafer sizes to gain productivity improvements for competitiveness enhancement. Thus, the 300mm automated fab will become the main stream in next generation. However, unlike the 200mm fab, there is only a few reference...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/45239473560887580719 |