Study of Cell Controller in Semiconductor Manufacturing
碩士 === 國立臺灣大學 === 機械工程學研究所 === 87 === The objective of this study is to design a modularized cell controller in which each module can be distributed over computers. Cell controller is one of the most important productive units in semiconductor fabrication. It coordinates, diagn...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/18672028972805694142 |