The Emission Control of Silane in A Clean Room
碩士 === 國立臺灣大學 === 機械工程學研究所 === 87 === Silane is an important gas used for CVD process in semiconductor industries, but the flue gas contain unreactive gases which are treated by burner directly. Silane may cause spontaneous ignition in atmosphere, and the product silicon dioxide could deposit near...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17187847879943692625 |