Water Conservation and Pollution Prevention in the Wafer Fabrication Industry
碩士 === 東海大學 === 環境科學系 === 87 === Manufacturing of semiconductor devices involves the following works: product and process designing, crystal ingot production, wafer manufacturing, chip cutting, inspection, and package. Among these, the wafer manufacturing has the most sophisticated proces...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/82388998838784915310 |