The Study on Vaccum System Control

碩士 === 國立臺北科技大學 === 機電整合研究所 === 87 === The purpose of this research is to develop a monitor controller system in order to measure the sediments’ thickness of the film. It not only helps operators to simply govern the whole process through the Window-based G.U.I. (Graphic User Interface), but also s...

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Bibliographic Details
Main Authors: Chang Hung-Chia, 張宏嘉
Other Authors: John Chou
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/16377153819443978527