Fabrication and Application of Silicon Micro Pressure Sensors
碩士 === 淡江大學 === 機械工程學系 === 87 === This thesis used silicon bulk-micromachining to fabricate silicon micro piezoresistive pressure sensors on the Pyrex 7740 glass. Different from the back-side etching of (100) silicon to from the membrane structure of pressure sensors, it etched the pressure cavity...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07069021887393718735 |