The Measurement of Fluid Flow and Heat Transfer in the Rectangular Microchannels
碩士 === 淡江大學 === 機械工程學系 === 87 === Rectangular microchannels made of (110)- orientated silicon wafer is produced by anisotropic etch that is compatible with semiconductor producing processes. By using different etching rules to obtain a series of distinct geometric configurations with micro-scale rec...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/32324499609070879216 |