Development of an Interval Neural Network for the Recognition of Semiconductor Wafer Defects and the Prediction of Wafer Yield
碩士 === 元智大學 === 工業工程研究所 === 87 === Semiconductor research and development is one of high techniques, however, due to the fact that the sophisticated process of semiconductor manufacturing is increased so that there always generates defected semiconductor wafers. At present, the defect inspection alm...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
1999
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85454600047185477223 |