WMG：A Wafer Map Generator by Disseminating Defect Patterns
碩士 === 中華大學 === 電機工程學系碩士班 === 88 === In this thesis, we analyze defect patterns on a Wafer Map by the way of disintegrating polyominoes patterns. After disintegrating, these ones can be recorded by different coefficients. According to the values, random disseminating polyonimoes patterns to another...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02239502131493825842 |
| Summary: | 碩士 === 中華大學 === 電機工程學系碩士班 === 88 === In this thesis, we analyze defect patterns on a Wafer Map by the way of disintegrating polyominoes patterns. After disintegrating, these ones can be recorded by different coefficients. According to the values, random disseminating polyonimoes patterns to another Wafer Maps. We can get simulative Wafer Maps then. Our purpose is to improve the yield. Observational research the relationships of the Wafer Maps between original and simulative ones.
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