MEMS Gyro Design
碩士 === 中華大學 === 機械與航太工程研究所 === 88 === ABSTRACT Two types of dual differential gyros are proposed in this thesis, one is made by CMOS process, and the other is made by the micro-machining process. The design concepts are the same, but the former is limited by the UMC 0.5mm stand...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/89885142374124974769 |