Preparation and Dry Etching Characteristics of Low Dielectric Constant Materials for ULSI Applications
碩士 === 中原大學 === 化學工程學系 === 88 === The purpose of this thesis is on the comparative analysis of the thermal stability and basic characteristics of FLARETM 2.0 and amorphous fluorocarbon film (a-C:F), which represent organic low-k polymers of two different deposition techniques. In FLARE 2.0, it was...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/80610369853966749754 |