Linear Scale with High Speed Feedback
碩士 === 中原大學 === 機械工程學系 === 88 === Linear scales have been widely used in precision metrology, such as the need of accurate positioning in semi-conductor industry, precision manufacturing machinery and automatic-controlled tools. As know, the precision of linear scales with a transmitted l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/12238003868340777398 |