Design and manufacture of XYZ-three axis precision positioning system
碩士 === 大葉大學 === 機械工程研究所 === 88 === ABSTRACT Recently, the needs for precise micropositioning aries in many fields of research and technology, such as in cellular biology, and SXM(scanning tunneling microscopy or scanning probe microscopy). The requirement of positioning system with submic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19237719343809663037 |