Effects of AlGaAs/GaAs Heterojunction Biplor Transistors by Inductively Couple Plasma
碩士 === 逢甲大學 === 化學工程學系 === 88 === AlGaAs/GaAs Heterojunction Biplor Transistors (HBTs) of III-V compound semiconductor that is high velocity and high current gain. In dry etching technologies , ICP (Inductively Couple Plasma) system has the valance of development in technology. But in the process of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/25324193663545735169 |