The Study of the Electrostatic Micropump
碩士 === 華梵大學 === 機電工程研究所 === 88 === This paper offer a new micropump,used electrostatic force to produce a traveling wave on the membrane. For this kind of micropump ,the valve is unnecessary ,and we expect it should have abilities to control the flow rate ,simply manufacture, low cost, and high yiel...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/64888898160425423082 |