| Summary: | 碩士 === 華梵大學 === 機電工程研究所 === 88 === This paper offer a new micropump,used electrostatic force to produce a traveling wave on the membrane. For this kind of micropump ,the valve is unnecessary ,and we expect it should have abilities to control the flow rate ,simply manufacture, low cost, and high yield reliability.
This paper probes not only into most kinds of the advanta- ges and disadvantages of micropump in this field, but also originates a new theorem and method to design the new integrating micropump. In this design of micrpump, it is unnecessary to set the valve, diffuser and nozzle. This paper is using the suitable phase difference of driven voltage signal to drive membrane deform by the electrostatic force, and then it pushes thefluid to move in single-way peristalsis.
Calculating the limit range of this electrostatic micropump, and counting up the value of apply voltage, capacitance and the size of deformation with using MEMs’s software”IntelliSuite”.
Finally, this paper designs a electrostatic micropump,200μm×2000μm×10μm, for a standard model, and offers five different voltage to calculate the flow rate is 520μl/min to16μl/min.
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