Hierarchical Neuro-Fuzzy Control for Micropositioning Systems Using Flexural Bearings
碩士 === 國立中興大學 === 機械工程學系 === 88 === Abstract The micropositioning system using flexural bearings (e. g., for wafer steppers and coarse-fine positioning systems) is a system of infinite degrees of freedom. It is difficult to design the controller for the partial differential equ...
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/40968926371945341170 |