含光學活性菠酯衍生基正型光阻之合成
碩士 === 國立成功大學 === 化學工程學系 === 88 === To investigate the chemical behavior of polymers bearing cycloaliphatic bornyl units, and the steric difference of the chiral (+)-bornyl methacrylate ((+)-BMA) and racemic ()-BMA units appeared on the physical properties of copolymers and resist characteristics,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/74462110456894547266 |