Growth of ITO Films in Low Temperature by Inductively-Coupled-Plasma Assisted Magnetron Sputtering Deposition
碩士 === 國立成功大學 === 化學工程學系 === 88 === Abstract Transparent conducting indium tin oxide (ITO) thin films are widely used in daily opto-electronic products, such as the transparent electrode on liquid crystal displays, the anti-radiation protective mirror on the aero and military a...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/73434312016056253372 |