Growth of Diamond Films and Carbon Nanotubes by Hollow Cathode Plasma-enhanced Chemical Vapor Deposition
博士 === 國立成功大學 === 化學工程學系 === 88 === A hollow cathode plasma-enhanced chemical vapor deposition (CVD) system was employed to deposit the diamond films and the aligned carbon nanotubes. Firstly, hollow cathode arc plasma CVD was employed to grow crystalline diamond films using methane or ch...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/95940819484818747634 |