(BaTiO3/SrTiO3)n mutilayer dielectric film grown by R.F. magnetron sputtering method and studied their microstructure and dielectric properties
碩士 === 國立成功大學 === 材料科學及工程學系 === 88 === ABSTRACT In this study, the dielectric thin film (BaTiO3/SrTiO3)n deposited onto n-type (100) Si substrates from BaTiO3 and SrTiO3 targets sintered separately by R. F. magnetron sputtering method. The deffusional layer (Ba1-x,Srx)TiO3...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/96494652084553885675 |