Characterization of Bottom Electrodes for Ta2O5 Thin-Film Capacitor
碩士 === 國立成功大學 === 材料科學及工程學系 === 88 === Characteristics of Ta2O5 capacitors on various bottom electrodes, including RuO2, 700℃annealed RuO2, poly-Si, and Ru, were investigated in this thesis. To obtain RuO2 thin films with good conductivity, the deposition parameters of RuO2 thin films and their char...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/26580376262436001885 |