Study of etching and oxide layers on n-GaN

碩士 === 國立成功大學 === 電機工程學系 === 88 === In this dissertation, investigation of etching, ohmic contacts, and oxide layers on n-GaN is our main work. We perform the etching of n-GaN by using KOH solution and Xenon RC-500B UV lamp illumination, named photo-enhanced chemical etching (PEC) method....

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Bibliographic Details
Main Authors: Tzung-Bau Nian, 粘宗寶
Other Authors: Yeong-Her Wang
Format: Others
Language:en_US
Published: 2000
Online Access:http://ndltd.ncl.edu.tw/handle/06130771632782012410

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