The Study and Fabrication of Advanced Piezoresistive Pressure and Shear-Stress Sensors by Micro-Electro-Mechanical System(MEMS) Technologies
碩士 === 國立成功大學 === 電機工程學系 === 88 === Based on computer finite element analysis ANSYS5.3 and micro-electro-mechanical system(MEMS) technologies, monolithic silicon micro pressure and shear-stress sensors have been designed and fabricated. The sensors employ one or two four-terminal shear-stress sensit...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51715769660576297106 |