An Application of TOC for Photolithography Area in Wafer Fabrication Factory
碩士 === 國立交通大學 === 工業工程與管理系 === 88 === In manufacturing line of IC , the structure of device to be made on wafer through repeat processes. All of wafers should be defined patterns at photo process and then delivered to next operational step for processing based on process flow. From manufacturing poi...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/31363041061571903926 |