Study on Chemical-Mechanical Polishing in the Copper Damascene Process
碩士 === 國立交通大學 === 材料科學與工程系 === 88 === Study on Chemical-Mechanical Polishing in the Copper Damascene Process Student: Cheng-Ging Chen Advisor: Dr. Ming-Shiann Feng Dr. Ming-Shih Tsai Institute of Materials Science and Engineering...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/02846127944871772642 |