Effect of Zicronia on Microstructure and Dielectric Properties of Barium Strontium Titanate Thin Film
碩士 === 國立交通大學 === 材料科學與工程系 === 88 === (Ba0.7Sr0.3)(ZrxTi1-x)O3 [x = 0、0.05、0.1、0.15、0.2] thin films were deposited on Pt/Ta/SiO2/Si(100) substrate by Sol-Gel and spin coating methods and then annealed at temperature ranging from 400℃ to 850℃ . The crystallization behavior and micro st...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/87058467699945021634 |