Microwave Electronic Cyclotron Resonance Plasma Immersion Ion Implantation Method On Metallic Substrates Implanted Nitrigen Ions And Characteristic Analysis
碩士 === 國立交通大學 === 材料科學與工程系 === 88 === ABSTRACT In this study, the ECR microwave plasma immersion ion implantation method was used to implant nitrogen ions on seven different substrate materials: Ti, Al, Cu, 70-30 Cu-Zn, AISI-D2, AISI-H13 and AISI-304. Effects of ion energy and implantatio...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/40664540457569410282 |