Lamp Configuration and Control System Design for Rapid Thermal Processing Systems
博士 === 國立交通大學 === 電機與控制工程系 === 88 === Rapid thermal processing (RTP) has become an alternative to the traditional furnace-based batch processing in semiconductor manufacturing processes such as annealing, nitridation and oxidation. We study design of temperature control system and lamp configuration...
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/65970260417464659468 |