光學薄膜應力與熱膨脹係數量測之研究
博士 === 國立中央大學 === 光電科學研究所 === 88 === This dissertation presents an original method for the measurement of the stress and the thermal expansion coefficient of optical thin films. The measuring method based on the phase shifting interferometry technique and five-step phase reduction algorithm. A circu...
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Format: | Others |
Language: | zh-TW |
Published: |
2000
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Online Access: | http://ndltd.ncl.edu.tw/handle/21367990210615948065 |