The Numerical Simulation of a MOCVD Reactor’s Thermal/Flow Field
碩士 === 國立屏東科技大學 === 機械工程系 === 88 === Abstract The purpose of this research is to analyze the horizontal MOCVD reactor for fabrication of GaAs deposited epitaxy by using the computational fluid dynamics methods. To use a commercial software(cosmos 2.0) to obtain reactor’s thermal a...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66140915034367020591 |