Fabrication and Characterization of the Polycrystalline-Diamond-Film MISFET
碩士 === 國立中山大學 === 電機工程學系研究所 === 88 === In this thesis﹐ As-grown and H-treated polycrystalline diamond film Metal-Insulator-Semiconductor Field-Effect-Transistor on the p-type surface semiconductive layers of undoped hydrogen-terminated CVD diamond films were successfully fabricated using a new fabri...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2000
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| Online Access: | http://ndltd.ncl.edu.tw/handle/09407927106373510753 |